射頻電源維修（RF Generator）--案例
發布時間：2018-05-23 09:20瀏覽次數：
| MKS/ENI | AD-TEC | COMDEL | DAIHEN | HUTTINGER | KYOSAN | SEREN | VEECO | NP(NEW POWER PLASMA) |
| DPG(RPDG) Series: | AX-1000 | DE8342R1 | RGA-50C | PFG 1600 | RFK20Z-SB5 | HR3001 | RF2051 | NPG 10KM |
| DPG-10-05 | AX-7500W | 0190-15594, FP7113RA | RGA-150A | PFG 300 | 30Z-SZ2 | I2000 | RF2070 | NPRHC-509L |
| DPG-10 | AX-10000W-AKT | CP5-500 | RGA-10A | PFG 1000 | RFK150ZD-TE1 | R1001 | RF600 | NPR-506L |
| ACG Series: | AX-3000 | LFMN8/5 | DRFS-5SA | RF7010 | JFK150ZD-TE1-RF | HR2001 | NPG 10K | |
| ACG-3 | AX-2000 | CPS-250 FP0014R2 | DRFS-10SB | TIG30-100 | RFK150ZD-TE6-RF | R2001 | NPG 15K | |
| ACG-3B | AX-2000III | CB1000 | AGA-27B1 | PFG 5000 | RFK100ZDTE6 | R3001 | NPG-15KM | |
| ACG-5 | AX-600Ⅲ | CB200 | AGA-50B2 | PFG 10000DC | RFK20Z-EL1 | R301 | ||
| ACG-6 | AX-1000Ⅲ | CB300 | AGA-27B | PFG 2500 | RFK200ZD | R201 | NPRHC-504L | |
| ACG-6B | AX-1000Ⅱ | CB50 | MFG-20SA1/3/4/6 | PF 1003 | RFK200FHTF1 | R601 | NPR-504L | |
| ACG-10 | AX-2000EUⅡ | CB5000 | MGA-20A | MF7100 | RFK200ZD-TE5 | R301MKII | NPE-309A | |
| ACG-1OB | AX-1000LFⅡ | CB600 | RFK200ZD-TE5-RF | NPR-510L | ||||
| 2100L-15P | AX-1000AMⅡ AMAT 0190-55019 | CB-600 | RFK20-TE5 | NPRLC-400 | ||||
| 5100L | AX-4000Ⅱ | CDX-1000 | HKF15Z-TW1 | GP-2A | ||||
| 600L | AX-4000III-40M-U1 | CDX-2000 | RFK200ZDPS2 | RFS 13150 | ||||
| 601P | AX-3000II | CDX-6000 | RFS-05C | |||||
| OEM Series: | AMV-2000-AMT | CLB-12K | RFS-2780A | |||||
| OEM-6 | CLB-3000 | RFS-1305A3 | ||||||
| OEM-6A | CLB-5000 | RFS-1305A3 |
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